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Coat/Develop Track

SOKUDO DUO
Coat/D­­evelop Track

 

RF3S
Coat/Develop Track

 

60EX/80EX
Coat/Develop Track

 

80EX Series Spray Coater
Coat/Develop Track

 

Wafer Cleaning System

FC-3100
Wet Station

WS-820L / WS-620C
Wet Station

FC-821L
Wet Station

CW-1500
Compact Wet Station

Spin Processor

SU-3200
Single Wafer Cleaner

SU-3100
Single Wafer Cleaner

SU-2000
Single Wafer Cleaner

Scrubber

SS-3200
Scrubber

SS-3100
Scrubber

SS-80BW
Scrubber

Polymer Removal

SU-3100
Single Wafer Cleaner

SU-2000
Single Wafer Cleaner

Annealing System

LA-3000-F
Flash Lamp Annealer

LA-830
Infrared lamp Annealer

LT-3000/3100
Laser Annealer

Measurement System

RE-3100/3300 Series
Ellipsometric Film Thickness
Measurement System

VM-2200/3200 Series
Spectrometric Film Thickness
Measurement System

VM-1200/1300 Series
Spectrometric Film Thickness
Measurement System

VM-1020/1030
Spectrometric Film Thickness
Measurement System

Inspection System

ZI-2000
Wafer Pattern Inspection
System

Advanced Packaging Lithography


DW-3000
Direct Imaging System for
Advanced Packaging

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